5/31/2010	10:48:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	10:48:31 AM	Recipe started at 10:48 AM
5/31/2010	10:48:31 AM	H2 valve closed
5/31/2010	10:48:31 AM	BCl3 valve closed
5/31/2010	10:48:31 AM	PH3 valve closed
5/31/2010	10:48:31 AM	SiCl4 pre valve closed
5/31/2010	10:48:31 AM	SiCl4 post valve closed
5/31/2010	10:48:31 AM	Main Vac valve closed
5/31/2010	10:48:31 AM	Bypass valve closed
5/31/2010	10:48:31 AM	Bubbler valve closed
5/31/2010	10:48:31 AM	Helium valve opened
5/31/2010	10:48:31 AM	Helium MFC set to  500.000000
5/31/2010	10:48:31 AM	H2 MFC set to  0.000000
5/31/2010	10:48:31 AM	BCl3 MFC set to  0.000000
5/31/2010	10:48:31 AM	PHl3 MFC set to  0.000000
5/31/2010	10:48:31 AM	SiCl4 MFC set to  0.000000
5/31/2010	10:48:31 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	10:48:31 AM	Tube furnace set to 0
5/31/2010	10:49:51 AM	Helium valve closed
5/31/2010	10:49:51 AM	H2 valve closed
5/31/2010	10:49:51 AM	BCl3 valve closed
5/31/2010	10:49:51 AM	PH3 valve closed
5/31/2010	10:49:51 AM	SiCl4 pre valve closed
5/31/2010	10:49:51 AM	SiCl4 post valve closed
5/31/2010	10:49:51 AM	Main Vac valve closed
5/31/2010	10:49:51 AM	Bypass valve closed
5/31/2010	10:49:51 AM	Bubbler valve closed
5/31/2010	10:49:51 AM	Helium MFC set to  0.000000
5/31/2010	10:49:51 AM	H2 MFC set to  0.000000
5/31/2010	10:49:51 AM	BCl3 MFC set to  0.000000
5/31/2010	10:49:51 AM	PHl3 MFC set to  0.000000
5/31/2010	10:49:51 AM	SiCl4 MFC set to  0.000000
5/31/2010	10:49:51 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	10:49:52 AM	Tube furnace set to 0
5/31/2010	10:49:52 AM	Run finished at 10:49 AM
5/31/2010	10:49:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	10:59:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	10:59:35 AM	Recipe started at 10:59 AM
5/31/2010	10:59:35 AM	Helium valve closed
5/31/2010	10:59:35 AM	H2 valve closed
5/31/2010	10:59:35 AM	BCl3 valve closed
5/31/2010	10:59:35 AM	PH3 valve closed
5/31/2010	10:59:35 AM	SiCl4 pre valve closed
5/31/2010	10:59:35 AM	SiCl4 post valve closed
5/31/2010	10:59:35 AM	Main Vac valve closed
5/31/2010	10:59:35 AM	Bubbler valve closed
5/31/2010	10:59:35 AM	Bypass valve opened
5/31/2010	10:59:35 AM	Helium MFC set to  0.000000
5/31/2010	10:59:35 AM	H2 MFC set to  0.000000
5/31/2010	10:59:35 AM	BCl3 MFC set to  0.000000
5/31/2010	10:59:35 AM	PHl3 MFC set to  0.000000
5/31/2010	10:59:35 AM	SiCl4 MFC set to  0.000000
5/31/2010	10:59:35 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	10:59:35 AM	Tube furnace set to 0
5/31/2010	11:00:22 AM	Helium valve closed
5/31/2010	11:00:22 AM	H2 valve closed
5/31/2010	11:00:22 AM	BCl3 valve closed
5/31/2010	11:00:22 AM	PH3 valve closed
5/31/2010	11:00:22 AM	SiCl4 pre valve closed
5/31/2010	11:00:22 AM	SiCl4 post valve closed
5/31/2010	11:00:22 AM	Bubbler valve closed
5/31/2010	11:00:22 AM	Main Vac valve opened
5/31/2010	11:00:22 AM	Bypass valve opened
5/31/2010	11:00:22 AM	Helium MFC set to  0.000000
5/31/2010	11:00:22 AM	H2 MFC set to  0.000000
5/31/2010	11:00:22 AM	BCl3 MFC set to  0.000000
5/31/2010	11:00:22 AM	PHl3 MFC set to  0.000000
5/31/2010	11:00:22 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:00:22 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:00:22 AM	Tube furnace set to 0
5/31/2010	11:00:23 AM	Run finished at 11:00 AM
5/31/2010	11:00:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	11:02:07 AM	Recipe started at 11:02 AM
5/31/2010	11:02:07 AM	H2 valve closed
5/31/2010	11:02:07 AM	BCl3 valve closed
5/31/2010	11:02:07 AM	PH3 valve closed
5/31/2010	11:02:07 AM	SiCl4 pre valve closed
5/31/2010	11:02:07 AM	SiCl4 post valve closed
5/31/2010	11:02:07 AM	Bubbler valve closed
5/31/2010	11:02:07 AM	Helium valve opened
5/31/2010	11:02:07 AM	Main Vac valve opened
5/31/2010	11:02:07 AM	Bypass valve opened
5/31/2010	11:02:07 AM	Helium MFC set to  100.000000
5/31/2010	11:02:07 AM	H2 MFC set to  0.000000
5/31/2010	11:02:07 AM	BCl3 MFC set to  0.000000
5/31/2010	11:02:07 AM	PHl3 MFC set to  0.000000
5/31/2010	11:02:07 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:02:07 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:02:07 AM	Tube furnace set to 0
5/31/2010	11:04:07 AM	Helium valve closed
5/31/2010	11:04:07 AM	H2 valve closed
5/31/2010	11:04:07 AM	BCl3 valve closed
5/31/2010	11:04:07 AM	PH3 valve closed
5/31/2010	11:04:07 AM	SiCl4 pre valve closed
5/31/2010	11:04:07 AM	SiCl4 post valve closed
5/31/2010	11:04:07 AM	Bubbler valve closed
5/31/2010	11:04:07 AM	Main Vac valve opened
5/31/2010	11:04:07 AM	Bypass valve opened
5/31/2010	11:04:07 AM	Helium MFC set to  0.000000
5/31/2010	11:04:07 AM	H2 MFC set to  0.000000
5/31/2010	11:04:07 AM	BCl3 MFC set to  0.000000
5/31/2010	11:04:07 AM	PHl3 MFC set to  0.000000
5/31/2010	11:04:07 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:04:07 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:04:07 AM	Tube furnace set to 0
5/31/2010	11:09:07 AM	H2 valve closed
5/31/2010	11:09:07 AM	BCl3 valve closed
5/31/2010	11:09:07 AM	PH3 valve closed
5/31/2010	11:09:07 AM	SiCl4 pre valve closed
5/31/2010	11:09:07 AM	SiCl4 post valve closed
5/31/2010	11:09:07 AM	Bubbler valve closed
5/31/2010	11:09:07 AM	Helium valve opened
5/31/2010	11:09:07 AM	Main Vac valve opened
5/31/2010	11:09:07 AM	Bypass valve opened
5/31/2010	11:09:07 AM	Helium MFC set to  100.000000
5/31/2010	11:09:07 AM	H2 MFC set to  0.000000
5/31/2010	11:09:07 AM	BCl3 MFC set to  0.000000
5/31/2010	11:09:07 AM	PHl3 MFC set to  0.000000
5/31/2010	11:09:07 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:09:07 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:09:07 AM	Tube furnace set to 0
5/31/2010	11:11:07 AM	Helium valve closed
5/31/2010	11:11:07 AM	H2 valve closed
5/31/2010	11:11:07 AM	BCl3 valve closed
5/31/2010	11:11:07 AM	PH3 valve closed
5/31/2010	11:11:08 AM	SiCl4 pre valve closed
5/31/2010	11:11:08 AM	SiCl4 post valve closed
5/31/2010	11:11:08 AM	Bubbler valve closed
5/31/2010	11:11:08 AM	Main Vac valve opened
5/31/2010	11:11:08 AM	Bypass valve opened
5/31/2010	11:11:08 AM	Helium MFC set to  0.000000
5/31/2010	11:11:08 AM	H2 MFC set to  0.000000
5/31/2010	11:11:08 AM	BCl3 MFC set to  0.000000
5/31/2010	11:11:08 AM	PHl3 MFC set to  0.000000
5/31/2010	11:11:08 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:11:08 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:11:08 AM	Tube furnace set to 0
5/31/2010	11:14:08 AM	Run finished at 11:14 AM
5/31/2010	11:25:37 AM	Recipe started at 11:25 AM
5/31/2010	11:25:37 AM	H2 valve closed
5/31/2010	11:25:37 AM	BCl3 valve closed
5/31/2010	11:25:37 AM	PH3 valve closed
5/31/2010	11:25:37 AM	SiCl4 pre valve closed
5/31/2010	11:25:37 AM	SiCl4 post valve closed
5/31/2010	11:25:37 AM	Bubbler valve closed
5/31/2010	11:25:37 AM	Helium valve opened
5/31/2010	11:25:37 AM	Main Vac valve opened
5/31/2010	11:25:37 AM	Bypass valve opened
5/31/2010	11:25:37 AM	Helium MFC set to  100.000000
5/31/2010	11:25:37 AM	H2 MFC set to  0.000000
5/31/2010	11:25:37 AM	BCl3 MFC set to  0.000000
5/31/2010	11:25:37 AM	PHl3 MFC set to  0.000000
5/31/2010	11:25:37 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:25:37 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:25:38 AM	Tube furnace set to 0
5/31/2010	11:27:38 AM	Helium valve closed
5/31/2010	11:27:38 AM	H2 valve closed
5/31/2010	11:27:38 AM	BCl3 valve closed
5/31/2010	11:27:38 AM	PH3 valve closed
5/31/2010	11:27:38 AM	SiCl4 pre valve closed
5/31/2010	11:27:38 AM	SiCl4 post valve closed
5/31/2010	11:27:38 AM	Bubbler valve closed
5/31/2010	11:27:38 AM	Main Vac valve opened
5/31/2010	11:27:38 AM	Bypass valve opened
5/31/2010	11:27:38 AM	Helium MFC set to  0.000000
5/31/2010	11:27:38 AM	H2 MFC set to  0.000000
5/31/2010	11:27:38 AM	BCl3 MFC set to  0.000000
5/31/2010	11:27:38 AM	PHl3 MFC set to  0.000000
5/31/2010	11:27:38 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:27:38 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:27:38 AM	Tube furnace set to 0
5/31/2010	11:30:38 AM	H2 valve closed
5/31/2010	11:30:38 AM	BCl3 valve closed
5/31/2010	11:30:38 AM	PH3 valve closed
5/31/2010	11:30:38 AM	SiCl4 pre valve closed
5/31/2010	11:30:38 AM	SiCl4 post valve closed
5/31/2010	11:30:38 AM	Bubbler valve closed
5/31/2010	11:30:38 AM	Helium valve opened
5/31/2010	11:30:38 AM	Main Vac valve opened
5/31/2010	11:30:38 AM	Bypass valve opened
5/31/2010	11:30:38 AM	Helium MFC set to  100.000000
5/31/2010	11:30:38 AM	H2 MFC set to  0.000000
5/31/2010	11:30:38 AM	BCl3 MFC set to  0.000000
5/31/2010	11:30:38 AM	PHl3 MFC set to  0.000000
5/31/2010	11:30:38 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:30:38 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:30:38 AM	Tube furnace set to 0
5/31/2010	11:32:38 AM	Helium valve closed
5/31/2010	11:32:38 AM	H2 valve closed
5/31/2010	11:32:38 AM	BCl3 valve closed
5/31/2010	11:32:38 AM	PH3 valve closed
5/31/2010	11:32:38 AM	SiCl4 pre valve closed
5/31/2010	11:32:38 AM	SiCl4 post valve closed
5/31/2010	11:32:38 AM	Bubbler valve closed
5/31/2010	11:32:38 AM	Main Vac valve opened
5/31/2010	11:32:38 AM	Bypass valve opened
5/31/2010	11:32:38 AM	Helium MFC set to  0.000000
5/31/2010	11:32:38 AM	H2 MFC set to  0.000000
5/31/2010	11:32:38 AM	BCl3 MFC set to  0.000000
5/31/2010	11:32:38 AM	PHl3 MFC set to  0.000000
5/31/2010	11:32:38 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:32:38 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:32:38 AM	Tube furnace set to 0
5/31/2010	11:35:38 AM	Run finished at 11:35 AM
5/31/2010	11:37:42 AM	Tube furnace set to 50
5/31/2010	11:37:58 AM	Main Vac valve closed
5/31/2010	11:38:00 AM	Bypass valve closed
5/31/2010	11:38:22 AM	Helium MFC set to  100.000000
5/31/2010	11:38:23 AM	Helium valve opened
5/31/2010	11:39:16 AM	Helium MFC set to  0.000000
5/31/2010	11:39:17 AM	Helium valve closed
5/31/2010	11:39:45 AM	Bypass valve opened
5/31/2010	11:40:00 AM	Main Vac valve opened
5/31/2010	11:41:45 AM	Recipe started at 11:41 AM
5/31/2010	11:41:45 AM	H2 valve closed
5/31/2010	11:41:45 AM	BCl3 valve closed
5/31/2010	11:41:45 AM	PH3 valve closed
5/31/2010	11:41:45 AM	SiCl4 pre valve closed
5/31/2010	11:41:45 AM	SiCl4 post valve closed
5/31/2010	11:41:45 AM	Bubbler valve closed
5/31/2010	11:41:45 AM	Helium valve opened
5/31/2010	11:41:45 AM	Main Vac valve opened
5/31/2010	11:41:45 AM	Bypass valve opened
5/31/2010	11:41:45 AM	Helium MFC set to  100.000000
5/31/2010	11:41:45 AM	H2 MFC set to  0.000000
5/31/2010	11:41:45 AM	BCl3 MFC set to  0.000000
5/31/2010	11:41:45 AM	PHl3 MFC set to  0.000000
5/31/2010	11:41:45 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:41:45 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:41:45 AM	Tube furnace set to 0
5/31/2010	11:43:45 AM	Helium valve closed
5/31/2010	11:43:45 AM	H2 valve closed
5/31/2010	11:43:45 AM	BCl3 valve closed
5/31/2010	11:43:45 AM	PH3 valve closed
5/31/2010	11:43:45 AM	SiCl4 pre valve closed
5/31/2010	11:43:45 AM	SiCl4 post valve closed
5/31/2010	11:43:45 AM	Bubbler valve closed
5/31/2010	11:43:45 AM	Main Vac valve opened
5/31/2010	11:43:45 AM	Bypass valve opened
5/31/2010	11:43:45 AM	Helium MFC set to  0.000000
5/31/2010	11:43:45 AM	H2 MFC set to  0.000000
5/31/2010	11:43:45 AM	BCl3 MFC set to  0.000000
5/31/2010	11:43:45 AM	PHl3 MFC set to  0.000000
5/31/2010	11:43:45 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:43:45 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:43:45 AM	Tube furnace set to 0
5/31/2010	11:44:28 AM	H2 valve closed
5/31/2010	11:44:28 AM	BCl3 valve closed
5/31/2010	11:44:28 AM	PH3 valve closed
5/31/2010	11:44:28 AM	SiCl4 pre valve closed
5/31/2010	11:44:28 AM	SiCl4 post valve closed
5/31/2010	11:44:28 AM	Bubbler valve closed
5/31/2010	11:44:28 AM	Helium valve opened
5/31/2010	11:44:28 AM	Main Vac valve opened
5/31/2010	11:44:28 AM	Bypass valve opened
5/31/2010	11:44:28 AM	Helium MFC set to  100.000000
5/31/2010	11:44:28 AM	H2 MFC set to  0.000000
5/31/2010	11:44:28 AM	BCl3 MFC set to  0.000000
5/31/2010	11:44:28 AM	PHl3 MFC set to  0.000000
5/31/2010	11:44:28 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:44:28 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:44:28 AM	Tube furnace set to 0
5/31/2010	11:44:33 AM	Helium valve closed
5/31/2010	11:44:33 AM	H2 valve closed
5/31/2010	11:44:33 AM	BCl3 valve closed
5/31/2010	11:44:33 AM	PH3 valve closed
5/31/2010	11:44:33 AM	SiCl4 pre valve closed
5/31/2010	11:44:33 AM	SiCl4 post valve closed
5/31/2010	11:44:33 AM	Bubbler valve closed
5/31/2010	11:44:33 AM	Main Vac valve opened
5/31/2010	11:44:33 AM	Bypass valve opened
5/31/2010	11:44:33 AM	Helium MFC set to  0.000000
5/31/2010	11:44:33 AM	H2 MFC set to  0.000000
5/31/2010	11:44:33 AM	BCl3 MFC set to  0.000000
5/31/2010	11:44:33 AM	PHl3 MFC set to  0.000000
5/31/2010	11:44:33 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:44:33 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:44:33 AM	Tube furnace set to 0
5/31/2010	11:44:35 AM	Run finished at 11:44 AM
5/31/2010	11:46:18 AM	Helium MFC set to  100.000000
5/31/2010	11:46:18 AM	Helium valve opened
5/31/2010	11:47:10 AM	Tube furnace set to 50
5/31/2010	11:47:26 AM	Helium MFC set to  0.000000
5/31/2010	11:47:27 AM	Helium valve closed
5/31/2010	11:48:35 AM	Recipe started at 11:48 AM
5/31/2010	11:48:35 AM	Helium valve closed
5/31/2010	11:48:35 AM	BCl3 valve closed
5/31/2010	11:48:35 AM	PH3 valve closed
5/31/2010	11:48:35 AM	SiCl4 pre valve closed
5/31/2010	11:48:35 AM	SiCl4 post valve closed
5/31/2010	11:48:35 AM	Main Vac valve closed
5/31/2010	11:48:35 AM	Bypass valve closed
5/31/2010	11:48:35 AM	Bubbler valve closed
5/31/2010	11:48:35 AM	H2 valve opened
5/31/2010	11:48:35 AM	Helium MFC set to  0.000000
5/31/2010	11:48:35 AM	H2 MFC set to  500.000000
5/31/2010	11:48:35 AM	BCl3 MFC set to  0.000000
5/31/2010	11:48:35 AM	PHl3 MFC set to  0.000000
5/31/2010	11:48:35 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:48:35 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:48:35 AM	Tube furnace set to 0
5/31/2010	11:49:57 AM	Helium valve closed
5/31/2010	11:49:57 AM	BCl3 valve closed
5/31/2010	11:49:57 AM	PH3 valve closed
5/31/2010	11:49:57 AM	SiCl4 pre valve closed
5/31/2010	11:49:57 AM	SiCl4 post valve closed
5/31/2010	11:49:57 AM	Main Vac valve closed
5/31/2010	11:49:57 AM	Bypass valve closed
5/31/2010	11:49:57 AM	H2 valve opened
5/31/2010	11:49:57 AM	Bubbler valve opened
5/31/2010	11:49:57 AM	Helium MFC set to  0.000000
5/31/2010	11:49:57 AM	H2 MFC set to  500.000000
5/31/2010	11:49:57 AM	BCl3 MFC set to  0.000000
5/31/2010	11:49:57 AM	PHl3 MFC set to  0.000000
5/31/2010	11:49:57 AM	SiCl4 MFC set to  0.000000
5/31/2010	11:49:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2010	11:49:57 AM	Tube furnace set to 1000
5/31/2010	12:09:57 PM	Helium valve closed
5/31/2010	12:09:57 PM	PH3 valve closed
5/31/2010	12:09:57 PM	Main Vac valve closed
5/31/2010	12:09:57 PM	Bypass valve closed
5/31/2010	12:09:57 PM	H2 valve opened
5/31/2010	12:09:57 PM	BCl3 valve opened
5/31/2010	12:09:57 PM	SiCl4 pre valve opened
5/31/2010	12:09:57 PM	SiCl4 post valve opened
5/31/2010	12:09:57 PM	Bubbler valve opened
5/31/2010	12:09:57 PM	Helium MFC set to  0.000000
5/31/2010	12:09:57 PM	H2 MFC set to  500.000000
5/31/2010	12:09:57 PM	BCl3 MFC set to  40.000000
5/31/2010	12:09:57 PM	PHl3 MFC set to  0.000000
5/31/2010	12:09:57 PM	SiCl4 MFC set to  50.000000
5/31/2010	12:09:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	12:09:58 PM	Tube furnace set to 1000
5/31/2010	12:21:57 PM	H2 valve closed
5/31/2010	12:21:57 PM	BCl3 valve closed
5/31/2010	12:21:57 PM	PH3 valve closed
5/31/2010	12:21:57 PM	SiCl4 pre valve closed
5/31/2010	12:21:58 PM	SiCl4 post valve closed
5/31/2010	12:21:58 PM	Main Vac valve closed
5/31/2010	12:21:58 PM	Bypass valve closed
5/31/2010	12:21:58 PM	Helium valve opened
5/31/2010	12:21:58 PM	Bubbler valve opened
5/31/2010	12:21:58 PM	Helium MFC set to  400.000000
5/31/2010	12:21:58 PM	H2 MFC set to  0.000000
5/31/2010	12:21:58 PM	BCl3 MFC set to  0.000000
5/31/2010	12:21:58 PM	PHl3 MFC set to  0.000000
5/31/2010	12:21:58 PM	SiCl4 MFC set to  0.000000
5/31/2010	12:21:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	12:21:58 PM	Tube furnace set to 0
5/31/2010	12:41:58 PM	Helium valve closed
5/31/2010	12:41:58 PM	H2 valve closed
5/31/2010	12:41:58 PM	BCl3 valve closed
5/31/2010	12:41:58 PM	PH3 valve closed
5/31/2010	12:41:58 PM	SiCl4 pre valve closed
5/31/2010	12:41:58 PM	SiCl4 post valve closed
5/31/2010	12:41:58 PM	Main Vac valve closed
5/31/2010	12:41:58 PM	Bypass valve closed
5/31/2010	12:41:58 PM	Bubbler valve closed
5/31/2010	12:41:58 PM	Helium MFC set to  0.000000
5/31/2010	12:41:58 PM	H2 MFC set to  0.000000
5/31/2010	12:41:58 PM	BCl3 MFC set to  0.000000
5/31/2010	12:41:58 PM	PHl3 MFC set to  0.000000
5/31/2010	12:41:58 PM	SiCl4 MFC set to  0.000000
5/31/2010	12:41:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	12:41:58 PM	Tube furnace set to 0
5/31/2010	12:41:58 PM	Run finished at 12:41 PM
5/31/2010	1:07:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	1:07:33 PM	Recipe started at 1:07 PM
5/31/2010	1:07:33 PM	H2 valve closed
5/31/2010	1:07:33 PM	BCl3 valve closed
5/31/2010	1:07:33 PM	PH3 valve closed
5/31/2010	1:07:33 PM	SiCl4 pre valve closed
5/31/2010	1:07:33 PM	SiCl4 post valve closed
5/31/2010	1:07:33 PM	Main Vac valve closed
5/31/2010	1:07:33 PM	Bypass valve closed
5/31/2010	1:07:33 PM	Bubbler valve closed
5/31/2010	1:07:33 PM	Helium valve opened
5/31/2010	1:07:33 PM	Helium MFC set to  500.000000
5/31/2010	1:07:33 PM	H2 MFC set to  0.000000
5/31/2010	1:07:33 PM	BCl3 MFC set to  0.000000
5/31/2010	1:07:33 PM	PHl3 MFC set to  0.000000
5/31/2010	1:07:33 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:07:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:07:34 PM	Tube furnace set to 0
5/31/2010	1:07:37 PM	Helium valve closed
5/31/2010	1:07:37 PM	H2 valve closed
5/31/2010	1:07:37 PM	BCl3 valve closed
5/31/2010	1:07:37 PM	PH3 valve closed
5/31/2010	1:07:37 PM	SiCl4 pre valve closed
5/31/2010	1:07:37 PM	SiCl4 post valve closed
5/31/2010	1:07:37 PM	Main Vac valve closed
5/31/2010	1:07:37 PM	Bypass valve closed
5/31/2010	1:07:37 PM	Bubbler valve closed
5/31/2010	1:07:37 PM	Helium MFC set to  0.000000
5/31/2010	1:07:37 PM	H2 MFC set to  0.000000
5/31/2010	1:07:37 PM	BCl3 MFC set to  0.000000
5/31/2010	1:07:37 PM	PHl3 MFC set to  0.000000
5/31/2010	1:07:37 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:07:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:07:37 PM	Tube furnace set to 0
5/31/2010	1:07:37 PM	Run finished at 1:07 PM
5/31/2010	1:07:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	1:08:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	1:08:57 PM	Recipe started at 1:08 PM
5/31/2010	1:08:57 PM	Helium valve closed
5/31/2010	1:08:57 PM	H2 valve closed
5/31/2010	1:08:57 PM	BCl3 valve closed
5/31/2010	1:08:57 PM	PH3 valve closed
5/31/2010	1:08:57 PM	SiCl4 pre valve closed
5/31/2010	1:08:57 PM	SiCl4 post valve closed
5/31/2010	1:08:57 PM	Main Vac valve closed
5/31/2010	1:08:57 PM	Bubbler valve closed
5/31/2010	1:08:57 PM	Bypass valve opened
5/31/2010	1:08:57 PM	Helium MFC set to  0.000000
5/31/2010	1:08:57 PM	H2 MFC set to  0.000000
5/31/2010	1:08:57 PM	BCl3 MFC set to  0.000000
5/31/2010	1:08:57 PM	PHl3 MFC set to  0.000000
5/31/2010	1:08:57 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:08:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:08:57 PM	Tube furnace set to 0
5/31/2010	1:09:44 PM	Helium valve closed
5/31/2010	1:09:44 PM	H2 valve closed
5/31/2010	1:09:44 PM	BCl3 valve closed
5/31/2010	1:09:44 PM	PH3 valve closed
5/31/2010	1:09:44 PM	SiCl4 pre valve closed
5/31/2010	1:09:44 PM	SiCl4 post valve closed
5/31/2010	1:09:44 PM	Bubbler valve closed
5/31/2010	1:09:44 PM	Main Vac valve opened
5/31/2010	1:09:44 PM	Bypass valve opened
5/31/2010	1:09:44 PM	Helium MFC set to  0.000000
5/31/2010	1:09:44 PM	H2 MFC set to  0.000000
5/31/2010	1:09:44 PM	BCl3 MFC set to  0.000000
5/31/2010	1:09:44 PM	PHl3 MFC set to  0.000000
5/31/2010	1:09:44 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:09:44 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:09:44 PM	Tube furnace set to 0
5/31/2010	1:09:44 PM	Run finished at 1:09 PM
5/31/2010	1:09:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	1:23:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	1:23:02 PM	Recipe started at 1:23 PM
5/31/2010	1:23:02 PM	H2 valve closed
5/31/2010	1:23:02 PM	BCl3 valve closed
5/31/2010	1:23:02 PM	PH3 valve closed
5/31/2010	1:23:02 PM	SiCl4 pre valve closed
5/31/2010	1:23:02 PM	SiCl4 post valve closed
5/31/2010	1:23:02 PM	Main Vac valve closed
5/31/2010	1:23:02 PM	Bypass valve closed
5/31/2010	1:23:02 PM	Bubbler valve closed
5/31/2010	1:23:02 PM	Helium valve opened
5/31/2010	1:23:02 PM	Helium MFC set to  500.000000
5/31/2010	1:23:02 PM	H2 MFC set to  0.000000
5/31/2010	1:23:02 PM	BCl3 MFC set to  0.000000
5/31/2010	1:23:02 PM	PHl3 MFC set to  0.000000
5/31/2010	1:23:02 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:23:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:23:02 PM	Tube furnace set to 0
5/31/2010	1:23:48 PM	Helium valve closed
5/31/2010	1:23:48 PM	H2 valve closed
5/31/2010	1:23:48 PM	BCl3 valve closed
5/31/2010	1:23:48 PM	PH3 valve closed
5/31/2010	1:23:48 PM	SiCl4 pre valve closed
5/31/2010	1:23:48 PM	SiCl4 post valve closed
5/31/2010	1:23:48 PM	Main Vac valve closed
5/31/2010	1:23:48 PM	Bypass valve closed
5/31/2010	1:23:48 PM	Bubbler valve closed
5/31/2010	1:23:48 PM	Helium MFC set to  0.000000
5/31/2010	1:23:48 PM	H2 MFC set to  0.000000
5/31/2010	1:23:48 PM	BCl3 MFC set to  0.000000
5/31/2010	1:23:48 PM	PHl3 MFC set to  0.000000
5/31/2010	1:23:48 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:23:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:23:48 PM	Tube furnace set to 0
5/31/2010	1:23:48 PM	Run finished at 1:23 PM
5/31/2010	1:23:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	1:25:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	1:25:11 PM	Recipe started at 1:25 PM
5/31/2010	1:25:11 PM	Helium valve closed
5/31/2010	1:25:11 PM	H2 valve closed
5/31/2010	1:25:11 PM	BCl3 valve closed
5/31/2010	1:25:11 PM	PH3 valve closed
5/31/2010	1:25:11 PM	SiCl4 pre valve closed
5/31/2010	1:25:11 PM	SiCl4 post valve closed
5/31/2010	1:25:11 PM	Main Vac valve closed
5/31/2010	1:25:11 PM	Bubbler valve closed
5/31/2010	1:25:11 PM	Bypass valve opened
5/31/2010	1:25:11 PM	Helium MFC set to  0.000000
5/31/2010	1:25:11 PM	H2 MFC set to  0.000000
5/31/2010	1:25:11 PM	BCl3 MFC set to  0.000000
5/31/2010	1:25:11 PM	PHl3 MFC set to  0.000000
5/31/2010	1:25:11 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:25:11 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:25:11 PM	Tube furnace set to 0
5/31/2010	1:25:58 PM	Helium valve closed
5/31/2010	1:25:58 PM	H2 valve closed
5/31/2010	1:25:58 PM	BCl3 valve closed
5/31/2010	1:25:58 PM	PH3 valve closed
5/31/2010	1:25:58 PM	SiCl4 pre valve closed
5/31/2010	1:25:58 PM	SiCl4 post valve closed
5/31/2010	1:25:58 PM	Bubbler valve closed
5/31/2010	1:25:58 PM	Main Vac valve opened
5/31/2010	1:25:58 PM	Bypass valve opened
5/31/2010	1:25:58 PM	Helium MFC set to  0.000000
5/31/2010	1:25:58 PM	H2 MFC set to  0.000000
5/31/2010	1:25:58 PM	BCl3 MFC set to  0.000000
5/31/2010	1:25:58 PM	PHl3 MFC set to  0.000000
5/31/2010	1:25:58 PM	SiCl4 MFC set to  0.000000
5/31/2010	1:25:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	1:25:59 PM	Tube furnace set to 0
5/31/2010	1:25:59 PM	Run finished at 1:25 PM
5/31/2010	1:25:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	2:45:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/31/2010	2:45:50 PM	Recipe started at 2:45 PM
5/31/2010	2:45:50 PM	H2 valve closed
5/31/2010	2:45:50 PM	BCl3 valve closed
5/31/2010	2:45:50 PM	PH3 valve closed
5/31/2010	2:45:50 PM	SiCl4 pre valve closed
5/31/2010	2:45:50 PM	SiCl4 post valve closed
5/31/2010	2:45:50 PM	Main Vac valve closed
5/31/2010	2:45:50 PM	Bypass valve closed
5/31/2010	2:45:50 PM	Bubbler valve closed
5/31/2010	2:45:50 PM	Helium valve opened
5/31/2010	2:45:50 PM	Helium MFC set to  500.000000
5/31/2010	2:45:50 PM	H2 MFC set to  0.000000
5/31/2010	2:45:50 PM	BCl3 MFC set to  0.000000
5/31/2010	2:45:50 PM	PHl3 MFC set to  0.000000
5/31/2010	2:45:50 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:45:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:45:50 PM	Tube furnace set to 0
5/31/2010	2:45:52 PM	Helium valve closed
5/31/2010	2:45:52 PM	H2 valve closed
5/31/2010	2:45:52 PM	BCl3 valve closed
5/31/2010	2:45:52 PM	PH3 valve closed
5/31/2010	2:45:52 PM	SiCl4 pre valve closed
5/31/2010	2:45:52 PM	SiCl4 post valve closed
5/31/2010	2:45:52 PM	Main Vac valve closed
5/31/2010	2:45:52 PM	Bypass valve closed
5/31/2010	2:45:52 PM	Bubbler valve closed
5/31/2010	2:45:52 PM	Helium MFC set to  0.000000
5/31/2010	2:45:52 PM	H2 MFC set to  0.000000
5/31/2010	2:45:52 PM	BCl3 MFC set to  0.000000
5/31/2010	2:45:52 PM	PHl3 MFC set to  0.000000
5/31/2010	2:45:52 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:45:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:45:52 PM	Tube furnace set to 0
5/31/2010	2:46:08 PM	Helium valve closed
5/31/2010	2:46:08 PM	H2 valve closed
5/31/2010	2:46:08 PM	BCl3 valve closed
5/31/2010	2:46:08 PM	PH3 valve closed
5/31/2010	2:46:08 PM	SiCl4 pre valve closed
5/31/2010	2:46:08 PM	SiCl4 post valve closed
5/31/2010	2:46:08 PM	Main Vac valve closed
5/31/2010	2:46:08 PM	Bubbler valve closed
5/31/2010	2:46:08 PM	Bypass valve opened
5/31/2010	2:46:08 PM	Helium MFC set to  0.000000
5/31/2010	2:46:08 PM	H2 MFC set to  0.000000
5/31/2010	2:46:08 PM	BCl3 MFC set to  0.000000
5/31/2010	2:46:08 PM	PHl3 MFC set to  0.000000
5/31/2010	2:46:08 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:46:08 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:46:08 PM	Tube furnace set to 0
5/31/2010	2:46:08 PM	Helium valve closed
5/31/2010	2:46:08 PM	H2 valve closed
5/31/2010	2:46:08 PM	BCl3 valve closed
5/31/2010	2:46:08 PM	PH3 valve closed
5/31/2010	2:46:08 PM	SiCl4 pre valve closed
5/31/2010	2:46:08 PM	SiCl4 post valve closed
5/31/2010	2:46:08 PM	Bubbler valve closed
5/31/2010	2:46:08 PM	Main Vac valve opened
5/31/2010	2:46:08 PM	Bypass valve opened
5/31/2010	2:46:08 PM	Helium MFC set to  0.000000
5/31/2010	2:46:08 PM	H2 MFC set to  0.000000
5/31/2010	2:46:08 PM	BCl3 MFC set to  0.000000
5/31/2010	2:46:08 PM	PHl3 MFC set to  0.000000
5/31/2010	2:46:08 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:46:08 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:46:08 PM	Tube furnace set to 0
5/31/2010	2:46:48 PM	H2 valve closed
5/31/2010	2:46:48 PM	BCl3 valve closed
5/31/2010	2:46:48 PM	PH3 valve closed
5/31/2010	2:46:48 PM	SiCl4 pre valve closed
5/31/2010	2:46:48 PM	SiCl4 post valve closed
5/31/2010	2:46:48 PM	Main Vac valve closed
5/31/2010	2:46:48 PM	Bypass valve closed
5/31/2010	2:46:48 PM	Bubbler valve closed
5/31/2010	2:46:48 PM	Helium valve opened
5/31/2010	2:46:48 PM	Helium MFC set to  500.000000
5/31/2010	2:46:48 PM	H2 MFC set to  0.000000
5/31/2010	2:46:48 PM	BCl3 MFC set to  0.000000
5/31/2010	2:46:48 PM	PHl3 MFC set to  0.000000
5/31/2010	2:46:48 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:46:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:46:48 PM	Tube furnace set to 0
5/31/2010	2:46:53 PM	Helium valve closed
5/31/2010	2:46:53 PM	H2 valve closed
5/31/2010	2:46:53 PM	BCl3 valve closed
5/31/2010	2:46:53 PM	PH3 valve closed
5/31/2010	2:46:53 PM	SiCl4 pre valve closed
5/31/2010	2:46:53 PM	SiCl4 post valve closed
5/31/2010	2:46:53 PM	Main Vac valve closed
5/31/2010	2:46:53 PM	Bypass valve closed
5/31/2010	2:46:53 PM	Bubbler valve closed
5/31/2010	2:46:53 PM	Helium MFC set to  0.000000
5/31/2010	2:46:53 PM	H2 MFC set to  0.000000
5/31/2010	2:46:53 PM	BCl3 MFC set to  0.000000
5/31/2010	2:46:53 PM	PHl3 MFC set to  0.000000
5/31/2010	2:46:53 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:46:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:46:53 PM	Tube furnace set to 0
5/31/2010	2:47:08 PM	Helium valve closed
5/31/2010	2:47:08 PM	H2 valve closed
5/31/2010	2:47:08 PM	BCl3 valve closed
5/31/2010	2:47:08 PM	PH3 valve closed
5/31/2010	2:47:08 PM	SiCl4 pre valve closed
5/31/2010	2:47:08 PM	SiCl4 post valve closed
5/31/2010	2:47:08 PM	Main Vac valve closed
5/31/2010	2:47:08 PM	Bubbler valve closed
5/31/2010	2:47:08 PM	Bypass valve opened
5/31/2010	2:47:08 PM	Helium MFC set to  0.000000
5/31/2010	2:47:08 PM	H2 MFC set to  0.000000
5/31/2010	2:47:08 PM	BCl3 MFC set to  0.000000
5/31/2010	2:47:08 PM	PHl3 MFC set to  0.000000
5/31/2010	2:47:08 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:47:08 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:47:08 PM	Tube furnace set to 0
5/31/2010	2:47:09 PM	Helium valve closed
5/31/2010	2:47:09 PM	H2 valve closed
5/31/2010	2:47:09 PM	BCl3 valve closed
5/31/2010	2:47:09 PM	PH3 valve closed
5/31/2010	2:47:09 PM	SiCl4 pre valve closed
5/31/2010	2:47:09 PM	SiCl4 post valve closed
5/31/2010	2:47:09 PM	Bubbler valve closed
5/31/2010	2:47:09 PM	Main Vac valve opened
5/31/2010	2:47:09 PM	Bypass valve opened
5/31/2010	2:47:09 PM	Helium MFC set to  0.000000
5/31/2010	2:47:09 PM	H2 MFC set to  0.000000
5/31/2010	2:47:09 PM	BCl3 MFC set to  0.000000
5/31/2010	2:47:09 PM	PHl3 MFC set to  0.000000
5/31/2010	2:47:09 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:47:09 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:47:09 PM	Tube furnace set to 0
5/31/2010	2:48:01 PM	Run aborted at 2:48 PM
5/31/2010	2:48:01 PM	Helium valve closed
5/31/2010	2:48:01 PM	H2 valve closed
5/31/2010	2:48:01 PM	BCl3 valve closed
5/31/2010	2:48:01 PM	PH3 valve closed
5/31/2010	2:48:01 PM	SiCl4 pre valve closed
5/31/2010	2:48:01 PM	SiCl4 post valve closed
5/31/2010	2:48:01 PM	Bypass valve closed
5/31/2010	2:48:01 PM	Main Vac valve closed
5/31/2010	2:48:01 PM	Bubbler valve closed
5/31/2010	2:48:01 PM	Helium MFC set to  0.000000
5/31/2010	2:48:01 PM	H2 MFC set to  0.000000
5/31/2010	2:48:01 PM	BCl3 MFC set to  0.000000
5/31/2010	2:48:01 PM	PHl3 MFC set to  0.000000
5/31/2010	2:48:01 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:48:01 PM	Tube furnace set to 0
5/31/2010	2:48:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/31/2010	2:48:05 PM	Bypass valve closed
5/31/2010	2:48:08 PM	Bypass valve opened
5/31/2010	2:48:09 PM	Main Vac valve closed
5/31/2010	2:48:13 PM	Main Vac valve opened
5/31/2010	2:48:28 PM	Main Vac valve closed
5/31/2010	2:48:30 PM	Bypass valve closed
5/31/2010	2:48:38 PM	Bypass valve opened
5/31/2010	2:48:39 PM	Main Vac valve opened
5/31/2010	2:49:29 PM	Recipe started at 2:49 PM
5/31/2010	2:49:29 PM	Helium valve closed
5/31/2010	2:49:29 PM	BCl3 valve closed
5/31/2010	2:49:29 PM	PH3 valve closed
5/31/2010	2:49:29 PM	SiCl4 pre valve closed
5/31/2010	2:49:29 PM	SiCl4 post valve closed
5/31/2010	2:49:29 PM	Main Vac valve closed
5/31/2010	2:49:29 PM	Bypass valve closed
5/31/2010	2:49:29 PM	Bubbler valve closed
5/31/2010	2:49:29 PM	H2 valve opened
5/31/2010	2:49:29 PM	Helium MFC set to  0.000000
5/31/2010	2:49:29 PM	H2 MFC set to  500.000000
5/31/2010	2:49:29 PM	BCl3 MFC set to  0.000000
5/31/2010	2:49:29 PM	PHl3 MFC set to  0.000000
5/31/2010	2:49:29 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:49:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:49:29 PM	Tube furnace set to 0
5/31/2010	2:50:51 PM	Helium valve closed
5/31/2010	2:50:51 PM	BCl3 valve closed
5/31/2010	2:50:51 PM	PH3 valve closed
5/31/2010	2:50:51 PM	SiCl4 pre valve closed
5/31/2010	2:50:51 PM	SiCl4 post valve closed
5/31/2010	2:50:51 PM	Main Vac valve closed
5/31/2010	2:50:51 PM	Bypass valve closed
5/31/2010	2:50:51 PM	H2 valve opened
5/31/2010	2:50:51 PM	Bubbler valve opened
5/31/2010	2:50:51 PM	Helium MFC set to  0.000000
5/31/2010	2:50:51 PM	H2 MFC set to  500.000000
5/31/2010	2:50:51 PM	BCl3 MFC set to  0.000000
5/31/2010	2:50:51 PM	PHl3 MFC set to  0.000000
5/31/2010	2:50:51 PM	SiCl4 MFC set to  0.000000
5/31/2010	2:50:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	2:50:51 PM	Tube furnace set to 1000
5/31/2010	3:10:51 PM	Helium valve closed
5/31/2010	3:10:51 PM	PH3 valve closed
5/31/2010	3:10:51 PM	Main Vac valve closed
5/31/2010	3:10:51 PM	Bypass valve closed
5/31/2010	3:10:51 PM	H2 valve opened
5/31/2010	3:10:51 PM	BCl3 valve opened
5/31/2010	3:10:51 PM	SiCl4 pre valve opened
5/31/2010	3:10:51 PM	SiCl4 post valve opened
5/31/2010	3:10:51 PM	Bubbler valve opened
5/31/2010	3:10:51 PM	Helium MFC set to  0.000000
5/31/2010	3:10:51 PM	H2 MFC set to  500.000000
5/31/2010	3:10:51 PM	BCl3 MFC set to  40.000000
5/31/2010	3:10:51 PM	PHl3 MFC set to  0.000000
5/31/2010	3:10:51 PM	SiCl4 MFC set to  50.000000
5/31/2010	3:10:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	3:10:51 PM	Tube furnace set to 1000
5/31/2010	3:25:51 PM	H2 valve closed
5/31/2010	3:25:51 PM	BCl3 valve closed
5/31/2010	3:25:51 PM	PH3 valve closed
5/31/2010	3:25:51 PM	SiCl4 pre valve closed
5/31/2010	3:25:51 PM	SiCl4 post valve closed
5/31/2010	3:25:51 PM	Main Vac valve closed
5/31/2010	3:25:51 PM	Bypass valve closed
5/31/2010	3:25:51 PM	Helium valve opened
5/31/2010	3:25:51 PM	Bubbler valve opened
5/31/2010	3:25:51 PM	Helium MFC set to  400.000000
5/31/2010	3:25:51 PM	H2 MFC set to  0.000000
5/31/2010	3:25:51 PM	BCl3 MFC set to  0.000000
5/31/2010	3:25:51 PM	PHl3 MFC set to  0.000000
5/31/2010	3:25:51 PM	SiCl4 MFC set to  0.000000
5/31/2010	3:25:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	3:25:51 PM	Tube furnace set to 0
5/31/2010	3:45:51 PM	Helium valve closed
5/31/2010	3:45:51 PM	H2 valve closed
5/31/2010	3:45:51 PM	BCl3 valve closed
5/31/2010	3:45:51 PM	PH3 valve closed
5/31/2010	3:45:51 PM	SiCl4 pre valve closed
5/31/2010	3:45:51 PM	SiCl4 post valve closed
5/31/2010	3:45:51 PM	Main Vac valve closed
5/31/2010	3:45:51 PM	Bypass valve closed
5/31/2010	3:45:51 PM	Bubbler valve closed
5/31/2010	3:45:51 PM	Helium MFC set to  0.000000
5/31/2010	3:45:51 PM	H2 MFC set to  0.000000
5/31/2010	3:45:51 PM	BCl3 MFC set to  0.000000
5/31/2010	3:45:51 PM	PHl3 MFC set to  0.000000
5/31/2010	3:45:51 PM	SiCl4 MFC set to  0.000000
5/31/2010	3:45:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	3:45:51 PM	Tube furnace set to 0
5/31/2010	3:45:52 PM	Run finished at 3:45 PM
5/31/2010	4:00:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	4:00:16 PM	Recipe started at 4:00 PM
5/31/2010	4:00:16 PM	Helium valve closed
5/31/2010	4:00:16 PM	H2 valve closed
5/31/2010	4:00:16 PM	BCl3 valve closed
5/31/2010	4:00:16 PM	PH3 valve closed
5/31/2010	4:00:16 PM	SiCl4 pre valve closed
5/31/2010	4:00:16 PM	SiCl4 post valve closed
5/31/2010	4:00:16 PM	Main Vac valve closed
5/31/2010	4:00:16 PM	Bubbler valve closed
5/31/2010	4:00:16 PM	Bypass valve opened
5/31/2010	4:00:16 PM	Helium MFC set to  0.000000
5/31/2010	4:00:16 PM	H2 MFC set to  0.000000
5/31/2010	4:00:16 PM	BCl3 MFC set to  0.000000
5/31/2010	4:00:16 PM	PHl3 MFC set to  0.000000
5/31/2010	4:00:16 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:00:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:00:16 PM	Tube furnace set to 0
5/31/2010	4:01:02 PM	Helium valve closed
5/31/2010	4:01:02 PM	H2 valve closed
5/31/2010	4:01:02 PM	BCl3 valve closed
5/31/2010	4:01:02 PM	PH3 valve closed
5/31/2010	4:01:02 PM	SiCl4 pre valve closed
5/31/2010	4:01:02 PM	SiCl4 post valve closed
5/31/2010	4:01:02 PM	Bubbler valve closed
5/31/2010	4:01:02 PM	Main Vac valve opened
5/31/2010	4:01:02 PM	Bypass valve opened
5/31/2010	4:01:02 PM	Helium MFC set to  0.000000
5/31/2010	4:01:02 PM	H2 MFC set to  0.000000
5/31/2010	4:01:02 PM	BCl3 MFC set to  0.000000
5/31/2010	4:01:02 PM	PHl3 MFC set to  0.000000
5/31/2010	4:01:02 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:01:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:01:02 PM	Tube furnace set to 0
5/31/2010	4:01:03 PM	Run finished at 4:01 PM
5/31/2010	4:01:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	4:02:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	4:02:03 PM	Recipe started at 4:02 PM
5/31/2010	4:02:03 PM	H2 valve closed
5/31/2010	4:02:03 PM	BCl3 valve closed
5/31/2010	4:02:03 PM	PH3 valve closed
5/31/2010	4:02:03 PM	SiCl4 pre valve closed
5/31/2010	4:02:03 PM	SiCl4 post valve closed
5/31/2010	4:02:03 PM	Main Vac valve closed
5/31/2010	4:02:03 PM	Bypass valve closed
5/31/2010	4:02:03 PM	Bubbler valve closed
5/31/2010	4:02:03 PM	Helium valve opened
5/31/2010	4:02:03 PM	Helium MFC set to  500.000000
5/31/2010	4:02:03 PM	H2 MFC set to  0.000000
5/31/2010	4:02:03 PM	BCl3 MFC set to  0.000000
5/31/2010	4:02:03 PM	PHl3 MFC set to  0.000000
5/31/2010	4:02:03 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:02:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:02:03 PM	Tube furnace set to 0
5/31/2010	4:03:06 PM	Helium valve closed
5/31/2010	4:03:06 PM	H2 valve closed
5/31/2010	4:03:06 PM	BCl3 valve closed
5/31/2010	4:03:06 PM	PH3 valve closed
5/31/2010	4:03:06 PM	SiCl4 pre valve closed
5/31/2010	4:03:06 PM	SiCl4 post valve closed
5/31/2010	4:03:06 PM	Main Vac valve closed
5/31/2010	4:03:06 PM	Bypass valve closed
5/31/2010	4:03:06 PM	Bubbler valve closed
5/31/2010	4:03:06 PM	Helium MFC set to  0.000000
5/31/2010	4:03:06 PM	H2 MFC set to  0.000000
5/31/2010	4:03:06 PM	BCl3 MFC set to  0.000000
5/31/2010	4:03:06 PM	PHl3 MFC set to  0.000000
5/31/2010	4:03:06 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:03:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:03:06 PM	Tube furnace set to 0
5/31/2010	4:03:06 PM	Run finished at 4:03 PM
5/31/2010	4:03:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	4:04:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	4:04:17 PM	Recipe started at 4:04 PM
5/31/2010	4:04:17 PM	Helium valve closed
5/31/2010	4:04:17 PM	H2 valve closed
5/31/2010	4:04:17 PM	BCl3 valve closed
5/31/2010	4:04:17 PM	PH3 valve closed
5/31/2010	4:04:17 PM	SiCl4 pre valve closed
5/31/2010	4:04:17 PM	SiCl4 post valve closed
5/31/2010	4:04:17 PM	Main Vac valve closed
5/31/2010	4:04:17 PM	Bubbler valve closed
5/31/2010	4:04:17 PM	Bypass valve opened
5/31/2010	4:04:17 PM	Helium MFC set to  0.000000
5/31/2010	4:04:17 PM	H2 MFC set to  0.000000
5/31/2010	4:04:17 PM	BCl3 MFC set to  0.000000
5/31/2010	4:04:17 PM	PHl3 MFC set to  0.000000
5/31/2010	4:04:17 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:04:17 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:04:18 PM	Tube furnace set to 0
5/31/2010	4:05:04 PM	Helium valve closed
5/31/2010	4:05:04 PM	H2 valve closed
5/31/2010	4:05:04 PM	BCl3 valve closed
5/31/2010	4:05:04 PM	PH3 valve closed
5/31/2010	4:05:04 PM	SiCl4 pre valve closed
5/31/2010	4:05:04 PM	SiCl4 post valve closed
5/31/2010	4:05:04 PM	Bubbler valve closed
5/31/2010	4:05:04 PM	Main Vac valve opened
5/31/2010	4:05:04 PM	Bypass valve opened
5/31/2010	4:05:04 PM	Helium MFC set to  0.000000
5/31/2010	4:05:04 PM	H2 MFC set to  0.000000
5/31/2010	4:05:04 PM	BCl3 MFC set to  0.000000
5/31/2010	4:05:04 PM	PHl3 MFC set to  0.000000
5/31/2010	4:05:04 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:05:04 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:05:04 PM	Tube furnace set to 0
5/31/2010	4:05:04 PM	Run finished at 4:05 PM
5/31/2010	4:05:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	4:06:52 PM	Recipe started at 4:06 PM
5/31/2010	4:06:52 PM	Helium valve closed
5/31/2010	4:06:52 PM	H2 valve closed
5/31/2010	4:06:52 PM	BCl3 valve closed
5/31/2010	4:06:52 PM	PH3 valve closed
5/31/2010	4:06:52 PM	SiCl4 pre valve closed
5/31/2010	4:06:52 PM	SiCl4 post valve closed
5/31/2010	4:06:52 PM	Bubbler valve closed
5/31/2010	4:06:52 PM	Main Vac valve opened
5/31/2010	4:06:52 PM	Bypass valve opened
5/31/2010	4:06:52 PM	Helium MFC set to  0.000000
5/31/2010	4:06:52 PM	H2 MFC set to  0.000000
5/31/2010	4:06:52 PM	BCl3 MFC set to  0.000000
5/31/2010	4:06:52 PM	PHl3 MFC set to  0.000000
5/31/2010	4:06:52 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:06:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:06:52 PM	Tube furnace set to 0
5/31/2010	4:06:57 PM	H2 valve closed
5/31/2010	4:06:57 PM	BCl3 valve closed
5/31/2010	4:06:57 PM	PH3 valve closed
5/31/2010	4:06:57 PM	SiCl4 pre valve closed
5/31/2010	4:06:57 PM	SiCl4 post valve closed
5/31/2010	4:06:57 PM	Bubbler valve closed
5/31/2010	4:06:57 PM	Helium valve opened
5/31/2010	4:06:57 PM	Main Vac valve opened
5/31/2010	4:06:57 PM	Bypass valve opened
5/31/2010	4:06:57 PM	Helium MFC set to  100.000000
5/31/2010	4:06:57 PM	H2 MFC set to  0.000000
5/31/2010	4:06:57 PM	BCl3 MFC set to  0.000000
5/31/2010	4:06:57 PM	PHl3 MFC set to  0.000000
5/31/2010	4:06:57 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:06:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:06:57 PM	Tube furnace set to 0
5/31/2010	4:08:57 PM	Helium valve closed
5/31/2010	4:08:57 PM	H2 valve closed
5/31/2010	4:08:57 PM	BCl3 valve closed
5/31/2010	4:08:57 PM	PH3 valve closed
5/31/2010	4:08:57 PM	SiCl4 pre valve closed
5/31/2010	4:08:57 PM	SiCl4 post valve closed
5/31/2010	4:08:57 PM	Bubbler valve closed
5/31/2010	4:08:57 PM	Main Vac valve opened
5/31/2010	4:08:57 PM	Bypass valve opened
5/31/2010	4:08:57 PM	Helium MFC set to  0.000000
5/31/2010	4:08:57 PM	H2 MFC set to  0.000000
5/31/2010	4:08:57 PM	BCl3 MFC set to  0.000000
5/31/2010	4:08:57 PM	PHl3 MFC set to  0.000000
5/31/2010	4:08:57 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:08:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:08:57 PM	Tube furnace set to 0
5/31/2010	4:13:57 PM	H2 valve closed
5/31/2010	4:13:57 PM	BCl3 valve closed
5/31/2010	4:13:57 PM	PH3 valve closed
5/31/2010	4:13:57 PM	SiCl4 pre valve closed
5/31/2010	4:13:57 PM	SiCl4 post valve closed
5/31/2010	4:13:57 PM	Bubbler valve closed
5/31/2010	4:13:57 PM	Helium valve opened
5/31/2010	4:13:57 PM	Main Vac valve opened
5/31/2010	4:13:58 PM	Bypass valve opened
5/31/2010	4:13:58 PM	Helium MFC set to  100.000000
5/31/2010	4:13:58 PM	H2 MFC set to  0.000000
5/31/2010	4:13:58 PM	BCl3 MFC set to  0.000000
5/31/2010	4:13:58 PM	PHl3 MFC set to  0.000000
5/31/2010	4:13:58 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:13:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:13:58 PM	Tube furnace set to 0
5/31/2010	4:15:58 PM	Helium valve closed
5/31/2010	4:15:58 PM	H2 valve closed
5/31/2010	4:15:58 PM	BCl3 valve closed
5/31/2010	4:15:58 PM	PH3 valve closed
5/31/2010	4:15:58 PM	SiCl4 pre valve closed
5/31/2010	4:15:58 PM	SiCl4 post valve closed
5/31/2010	4:15:58 PM	Bubbler valve closed
5/31/2010	4:15:58 PM	Main Vac valve opened
5/31/2010	4:15:58 PM	Bypass valve opened
5/31/2010	4:15:58 PM	Helium MFC set to  0.000000
5/31/2010	4:15:58 PM	H2 MFC set to  0.000000
5/31/2010	4:15:58 PM	BCl3 MFC set to  0.000000
5/31/2010	4:15:58 PM	PHl3 MFC set to  0.000000
5/31/2010	4:15:58 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:15:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:15:58 PM	Tube furnace set to 0
5/31/2010	4:18:40 PM	Run finished at 4:18 PM
5/31/2010	4:19:10 PM	Recipe started at 4:19 PM
5/31/2010	4:19:10 PM	H2 valve closed
5/31/2010	4:19:10 PM	BCl3 valve closed
5/31/2010	4:19:10 PM	PH3 valve closed
5/31/2010	4:19:10 PM	SiCl4 pre valve closed
5/31/2010	4:19:10 PM	SiCl4 post valve closed
5/31/2010	4:19:10 PM	Bubbler valve closed
5/31/2010	4:19:10 PM	Helium valve opened
5/31/2010	4:19:10 PM	Main Vac valve opened
5/31/2010	4:19:10 PM	Bypass valve opened
5/31/2010	4:19:10 PM	Helium MFC set to  100.000000
5/31/2010	4:19:10 PM	H2 MFC set to  0.000000
5/31/2010	4:19:10 PM	BCl3 MFC set to  0.000000
5/31/2010	4:19:10 PM	PHl3 MFC set to  0.000000
5/31/2010	4:19:10 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:19:10 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:19:10 PM	Tube furnace set to 0
5/31/2010	4:21:11 PM	Helium valve closed
5/31/2010	4:21:11 PM	H2 valve closed
5/31/2010	4:21:11 PM	BCl3 valve closed
5/31/2010	4:21:11 PM	PH3 valve closed
5/31/2010	4:21:11 PM	SiCl4 pre valve closed
5/31/2010	4:21:11 PM	SiCl4 post valve closed
5/31/2010	4:21:11 PM	Bubbler valve closed
5/31/2010	4:21:11 PM	Main Vac valve opened
5/31/2010	4:21:11 PM	Bypass valve opened
5/31/2010	4:21:11 PM	Helium MFC set to  0.000000
5/31/2010	4:21:11 PM	H2 MFC set to  0.000000
5/31/2010	4:21:11 PM	BCl3 MFC set to  0.000000
5/31/2010	4:21:11 PM	PHl3 MFC set to  0.000000
5/31/2010	4:21:11 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:21:11 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:21:11 PM	Tube furnace set to 0
5/31/2010	4:26:11 PM	H2 valve closed
5/31/2010	4:26:11 PM	BCl3 valve closed
5/31/2010	4:26:11 PM	PH3 valve closed
5/31/2010	4:26:11 PM	SiCl4 pre valve closed
5/31/2010	4:26:11 PM	SiCl4 post valve closed
5/31/2010	4:26:11 PM	Bubbler valve closed
5/31/2010	4:26:11 PM	Helium valve opened
5/31/2010	4:26:11 PM	Main Vac valve opened
5/31/2010	4:26:11 PM	Bypass valve opened
5/31/2010	4:26:11 PM	Helium MFC set to  100.000000
5/31/2010	4:26:11 PM	H2 MFC set to  0.000000
5/31/2010	4:26:11 PM	BCl3 MFC set to  0.000000
5/31/2010	4:26:11 PM	PHl3 MFC set to  0.000000
5/31/2010	4:26:11 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:26:11 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:26:11 PM	Tube furnace set to 0
5/31/2010	4:28:11 PM	Helium valve closed
5/31/2010	4:28:11 PM	H2 valve closed
5/31/2010	4:28:11 PM	BCl3 valve closed
5/31/2010	4:28:11 PM	PH3 valve closed
5/31/2010	4:28:11 PM	SiCl4 pre valve closed
5/31/2010	4:28:11 PM	SiCl4 post valve closed
5/31/2010	4:28:11 PM	Bubbler valve closed
5/31/2010	4:28:11 PM	Main Vac valve opened
5/31/2010	4:28:11 PM	Bypass valve opened
5/31/2010	4:28:11 PM	Helium MFC set to  0.000000
5/31/2010	4:28:11 PM	H2 MFC set to  0.000000
5/31/2010	4:28:11 PM	BCl3 MFC set to  0.000000
5/31/2010	4:28:11 PM	PHl3 MFC set to  0.000000
5/31/2010	4:28:11 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:28:11 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:28:11 PM	Tube furnace set to 0
5/31/2010	4:31:11 PM	Run finished at 4:31 PM
5/31/2010	4:32:31 PM	Helium MFC set to  200.000000
5/31/2010	4:32:32 PM	Helium valve opened
5/31/2010	4:32:37 PM	Main Vac valve closed
5/31/2010	4:32:39 PM	Bypass valve closed
5/31/2010	4:33:32 PM	Helium MFC set to  0.000000
5/31/2010	4:33:33 PM	Helium valve closed
5/31/2010	4:33:39 PM	Bypass valve opened
5/31/2010	4:34:01 PM	Main Vac valve opened
5/31/2010	4:34:51 PM	Helium MFC set to  100.000000
5/31/2010	4:34:51 PM	Helium valve opened
5/31/2010	4:39:36 PM	Helium MFC set to  0.000000
5/31/2010	4:39:37 PM	Helium valve closed
5/31/2010	4:40:11 PM	Main Vac valve closed
5/31/2010	4:40:13 PM	Bypass valve closed
5/31/2010	4:40:18 PM	Bypass valve opened
5/31/2010	4:40:19 PM	Main Vac valve opened
5/31/2010	4:40:57 PM	Recipe started at 4:40 PM
5/31/2010	4:40:57 PM	Helium valve closed
5/31/2010	4:40:57 PM	BCl3 valve closed
5/31/2010	4:40:57 PM	PH3 valve closed
5/31/2010	4:40:57 PM	SiCl4 pre valve closed
5/31/2010	4:40:57 PM	SiCl4 post valve closed
5/31/2010	4:40:57 PM	Main Vac valve closed
5/31/2010	4:40:57 PM	Bypass valve closed
5/31/2010	4:40:57 PM	Bubbler valve closed
5/31/2010	4:40:57 PM	H2 valve opened
5/31/2010	4:40:57 PM	Helium MFC set to  0.000000
5/31/2010	4:40:57 PM	H2 MFC set to  500.000000
5/31/2010	4:40:57 PM	BCl3 MFC set to  0.000000
5/31/2010	4:40:57 PM	PHl3 MFC set to  0.000000
5/31/2010	4:40:57 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:40:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:40:57 PM	Tube furnace set to 0
5/31/2010	4:42:16 PM	Helium valve closed
5/31/2010	4:42:16 PM	BCl3 valve closed
5/31/2010	4:42:16 PM	PH3 valve closed
5/31/2010	4:42:16 PM	SiCl4 pre valve closed
5/31/2010	4:42:16 PM	SiCl4 post valve closed
5/31/2010	4:42:16 PM	Main Vac valve closed
5/31/2010	4:42:16 PM	Bypass valve closed
5/31/2010	4:42:16 PM	H2 valve opened
5/31/2010	4:42:16 PM	Bubbler valve opened
5/31/2010	4:42:16 PM	Helium MFC set to  0.000000
5/31/2010	4:42:16 PM	H2 MFC set to  500.000000
5/31/2010	4:42:16 PM	BCl3 MFC set to  0.000000
5/31/2010	4:42:16 PM	PHl3 MFC set to  0.000000
5/31/2010	4:42:16 PM	SiCl4 MFC set to  0.000000
5/31/2010	4:42:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	4:42:16 PM	Tube furnace set to 1000
5/31/2010	5:02:16 PM	Helium valve closed
5/31/2010	5:02:16 PM	PH3 valve closed
5/31/2010	5:02:16 PM	Main Vac valve closed
5/31/2010	5:02:16 PM	Bypass valve closed
5/31/2010	5:02:16 PM	H2 valve opened
5/31/2010	5:02:16 PM	BCl3 valve opened
5/31/2010	5:02:16 PM	SiCl4 pre valve opened
5/31/2010	5:02:16 PM	SiCl4 post valve opened
5/31/2010	5:02:16 PM	Bubbler valve opened
5/31/2010	5:02:16 PM	Helium MFC set to  0.000000
5/31/2010	5:02:16 PM	H2 MFC set to  500.000000
5/31/2010	5:02:16 PM	BCl3 MFC set to  50.000000
5/31/2010	5:02:16 PM	PHl3 MFC set to  0.000000
5/31/2010	5:02:16 PM	SiCl4 MFC set to  50.000000
5/31/2010	5:02:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	5:02:16 PM	Tube furnace set to 1000
5/31/2010	5:14:16 PM	H2 valve closed
5/31/2010	5:14:16 PM	BCl3 valve closed
5/31/2010	5:14:16 PM	PH3 valve closed
5/31/2010	5:14:16 PM	SiCl4 pre valve closed
5/31/2010	5:14:16 PM	SiCl4 post valve closed
5/31/2010	5:14:16 PM	Main Vac valve closed
5/31/2010	5:14:16 PM	Bypass valve closed
5/31/2010	5:14:16 PM	Helium valve opened
5/31/2010	5:14:16 PM	Bubbler valve opened
5/31/2010	5:14:16 PM	Helium MFC set to  500.000000
5/31/2010	5:14:16 PM	H2 MFC set to  0.000000
5/31/2010	5:14:16 PM	BCl3 MFC set to  0.000000
5/31/2010	5:14:16 PM	PHl3 MFC set to  0.000000
5/31/2010	5:14:16 PM	SiCl4 MFC set to  0.000000
5/31/2010	5:14:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	5:14:17 PM	Tube furnace set to 0
5/31/2010	5:34:17 PM	Helium valve closed
5/31/2010	5:34:17 PM	H2 valve closed
5/31/2010	5:34:17 PM	BCl3 valve closed
5/31/2010	5:34:17 PM	PH3 valve closed
5/31/2010	5:34:17 PM	SiCl4 pre valve closed
5/31/2010	5:34:17 PM	SiCl4 post valve closed
5/31/2010	5:34:17 PM	Main Vac valve closed
5/31/2010	5:34:17 PM	Bypass valve closed
5/31/2010	5:34:17 PM	Bubbler valve closed
5/31/2010	5:34:17 PM	Helium MFC set to  0.000000
5/31/2010	5:34:17 PM	H2 MFC set to  0.000000
5/31/2010	5:34:17 PM	BCl3 MFC set to  0.000000
5/31/2010	5:34:17 PM	PHl3 MFC set to  0.000000
5/31/2010	5:34:17 PM	SiCl4 MFC set to  0.000000
5/31/2010	5:34:17 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	5:34:17 PM	Tube furnace set to 0
5/31/2010	5:34:17 PM	Run finished at 5:34 PM
5/31/2010	5:43:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	5:43:26 PM	Recipe started at 5:43 PM
5/31/2010	5:43:26 PM	Helium valve closed
5/31/2010	5:43:26 PM	H2 valve closed
5/31/2010	5:43:26 PM	BCl3 valve closed
5/31/2010	5:43:26 PM	PH3 valve closed
5/31/2010	5:43:26 PM	SiCl4 pre valve closed
5/31/2010	5:43:26 PM	SiCl4 post valve closed
5/31/2010	5:43:26 PM	Main Vac valve closed
5/31/2010	5:43:26 PM	Bubbler valve closed
5/31/2010	5:43:26 PM	Bypass valve opened
5/31/2010	5:43:26 PM	Helium MFC set to  0.000000
5/31/2010	5:43:26 PM	H2 MFC set to  0.000000
5/31/2010	5:43:26 PM	BCl3 MFC set to  0.000000
5/31/2010	5:43:26 PM	PHl3 MFC set to  0.000000
5/31/2010	5:43:26 PM	SiCl4 MFC set to  0.000000
5/31/2010	5:43:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	5:43:26 PM	Tube furnace set to 0
5/31/2010	5:44:12 PM	Helium valve closed
5/31/2010	5:44:12 PM	H2 valve closed
5/31/2010	5:44:12 PM	BCl3 valve closed
5/31/2010	5:44:12 PM	PH3 valve closed
5/31/2010	5:44:12 PM	SiCl4 pre valve closed
5/31/2010	5:44:12 PM	SiCl4 post valve closed
5/31/2010	5:44:12 PM	Bubbler valve closed
5/31/2010	5:44:12 PM	Main Vac valve opened
5/31/2010	5:44:12 PM	Bypass valve opened
5/31/2010	5:44:12 PM	Helium MFC set to  0.000000
5/31/2010	5:44:12 PM	H2 MFC set to  0.000000
5/31/2010	5:44:12 PM	BCl3 MFC set to  0.000000
5/31/2010	5:44:12 PM	PHl3 MFC set to  0.000000
5/31/2010	5:44:12 PM	SiCl4 MFC set to  0.000000
5/31/2010	5:44:12 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	5:44:12 PM	Tube furnace set to 0
5/31/2010	5:44:12 PM	Run finished at 5:44 PM
5/31/2010	5:44:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	9:07:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	9:07:19 PM	Recipe started at 9:07 PM
5/31/2010	9:07:19 PM	H2 valve closed
5/31/2010	9:07:19 PM	BCl3 valve closed
5/31/2010	9:07:19 PM	PH3 valve closed
5/31/2010	9:07:19 PM	SiCl4 pre valve closed
5/31/2010	9:07:19 PM	SiCl4 post valve closed
5/31/2010	9:07:19 PM	Main Vac valve closed
5/31/2010	9:07:19 PM	Bypass valve closed
5/31/2010	9:07:19 PM	Bubbler valve closed
5/31/2010	9:07:19 PM	Helium valve opened
5/31/2010	9:07:19 PM	Helium MFC set to  500.000000
5/31/2010	9:07:19 PM	H2 MFC set to  0.000000
5/31/2010	9:07:19 PM	BCl3 MFC set to  0.000000
5/31/2010	9:07:19 PM	PHl3 MFC set to  0.000000
5/31/2010	9:07:19 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:07:19 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:07:19 PM	Tube furnace set to 0
5/31/2010	9:08:38 PM	Helium valve closed
5/31/2010	9:08:38 PM	H2 valve closed
5/31/2010	9:08:38 PM	BCl3 valve closed
5/31/2010	9:08:38 PM	PH3 valve closed
5/31/2010	9:08:38 PM	SiCl4 pre valve closed
5/31/2010	9:08:38 PM	SiCl4 post valve closed
5/31/2010	9:08:38 PM	Main Vac valve closed
5/31/2010	9:08:38 PM	Bypass valve closed
5/31/2010	9:08:38 PM	Bubbler valve closed
5/31/2010	9:08:38 PM	Helium MFC set to  0.000000
5/31/2010	9:08:38 PM	H2 MFC set to  0.000000
5/31/2010	9:08:38 PM	BCl3 MFC set to  0.000000
5/31/2010	9:08:38 PM	PHl3 MFC set to  0.000000
5/31/2010	9:08:38 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:08:38 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:08:38 PM	Tube furnace set to 0
5/31/2010	9:08:39 PM	Run finished at 9:08 PM
5/31/2010	9:08:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2010	9:14:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	9:14:01 PM	Recipe started at 9:14 PM
5/31/2010	9:14:01 PM	Helium valve closed
5/31/2010	9:14:01 PM	H2 valve closed
5/31/2010	9:14:01 PM	BCl3 valve closed
5/31/2010	9:14:01 PM	PH3 valve closed
5/31/2010	9:14:01 PM	SiCl4 pre valve closed
5/31/2010	9:14:01 PM	SiCl4 post valve closed
5/31/2010	9:14:01 PM	Main Vac valve closed
5/31/2010	9:14:01 PM	Bubbler valve closed
5/31/2010	9:14:01 PM	Bypass valve opened
5/31/2010	9:14:01 PM	Helium MFC set to  0.000000
5/31/2010	9:14:01 PM	H2 MFC set to  0.000000
5/31/2010	9:14:01 PM	BCl3 MFC set to  0.000000
5/31/2010	9:14:01 PM	PHl3 MFC set to  0.000000
5/31/2010	9:14:01 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:14:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:14:01 PM	Tube furnace set to 0
5/31/2010	9:14:48 PM	Helium valve closed
5/31/2010	9:14:48 PM	H2 valve closed
5/31/2010	9:14:48 PM	BCl3 valve closed
5/31/2010	9:14:48 PM	PH3 valve closed
5/31/2010	9:14:48 PM	SiCl4 pre valve closed
5/31/2010	9:14:48 PM	SiCl4 post valve closed
5/31/2010	9:14:48 PM	Bubbler valve closed
5/31/2010	9:14:48 PM	Main Vac valve opened
5/31/2010	9:14:48 PM	Bypass valve opened
5/31/2010	9:14:48 PM	Helium MFC set to  0.000000
5/31/2010	9:14:48 PM	H2 MFC set to  0.000000
5/31/2010	9:14:48 PM	BCl3 MFC set to  0.000000
5/31/2010	9:14:48 PM	PHl3 MFC set to  0.000000
5/31/2010	9:14:48 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:14:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:14:48 PM	Tube furnace set to 0
5/31/2010	9:14:49 PM	Run finished at 9:14 PM
5/31/2010	9:14:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2010	9:15:20 PM	Bypass valve closed
5/31/2010	9:15:21 PM	Main Vac valve closed
5/31/2010	9:15:40 PM	Bypass valve opened
5/31/2010	9:15:41 PM	Main Vac valve opened
5/31/2010	9:15:55 PM	Main Vac valve closed
5/31/2010	9:15:56 PM	Bypass valve closed
5/31/2010	9:16:01 PM	Bypass valve opened
5/31/2010	9:16:01 PM	Main Vac valve opened
5/31/2010	9:16:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/31/2010	9:16:16 PM	Recipe started at 9:16 PM
5/31/2010	9:16:16 PM	H2 valve closed
5/31/2010	9:16:16 PM	BCl3 valve closed
5/31/2010	9:16:16 PM	PH3 valve closed
5/31/2010	9:16:16 PM	SiCl4 pre valve closed
5/31/2010	9:16:16 PM	SiCl4 post valve closed
5/31/2010	9:16:16 PM	Main Vac valve closed
5/31/2010	9:16:16 PM	Bypass valve closed
5/31/2010	9:16:16 PM	Bubbler valve closed
5/31/2010	9:16:16 PM	Helium valve opened
5/31/2010	9:16:16 PM	Helium MFC set to  500.000000
5/31/2010	9:16:16 PM	H2 MFC set to  0.000000
5/31/2010	9:16:16 PM	BCl3 MFC set to  0.000000
5/31/2010	9:16:16 PM	PHl3 MFC set to  0.000000
5/31/2010	9:16:16 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:16:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:16:17 PM	Tube furnace set to 0
5/31/2010	9:17:38 PM	Helium valve closed
5/31/2010	9:17:38 PM	H2 valve closed
5/31/2010	9:17:38 PM	BCl3 valve closed
5/31/2010	9:17:38 PM	PH3 valve closed
5/31/2010	9:17:38 PM	SiCl4 pre valve closed
5/31/2010	9:17:38 PM	SiCl4 post valve closed
5/31/2010	9:17:38 PM	Main Vac valve closed
5/31/2010	9:17:38 PM	Bypass valve closed
5/31/2010	9:17:38 PM	Bubbler valve closed
5/31/2010	9:17:38 PM	Helium MFC set to  0.000000
5/31/2010	9:17:38 PM	H2 MFC set to  0.000000
5/31/2010	9:17:38 PM	BCl3 MFC set to  0.000000
5/31/2010	9:17:38 PM	PHl3 MFC set to  0.000000
5/31/2010	9:17:38 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:17:38 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:17:38 PM	Tube furnace set to 0
5/31/2010	9:17:53 PM	Helium valve closed
5/31/2010	9:17:53 PM	H2 valve closed
5/31/2010	9:17:53 PM	BCl3 valve closed
5/31/2010	9:17:53 PM	PH3 valve closed
5/31/2010	9:17:53 PM	SiCl4 pre valve closed
5/31/2010	9:17:53 PM	SiCl4 post valve closed
5/31/2010	9:17:53 PM	Main Vac valve closed
5/31/2010	9:17:53 PM	Bubbler valve closed
5/31/2010	9:17:53 PM	Bypass valve opened
5/31/2010	9:17:53 PM	Helium MFC set to  0.000000
5/31/2010	9:17:53 PM	H2 MFC set to  0.000000
5/31/2010	9:17:53 PM	BCl3 MFC set to  0.000000
5/31/2010	9:17:53 PM	PHl3 MFC set to  0.000000
5/31/2010	9:17:53 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:17:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:17:53 PM	Tube furnace set to 0
5/31/2010	9:18:27 PM	Helium valve closed
5/31/2010	9:18:27 PM	H2 valve closed
5/31/2010	9:18:27 PM	BCl3 valve closed
5/31/2010	9:18:27 PM	PH3 valve closed
5/31/2010	9:18:27 PM	SiCl4 pre valve closed
5/31/2010	9:18:27 PM	SiCl4 post valve closed
5/31/2010	9:18:27 PM	Bubbler valve closed
5/31/2010	9:18:27 PM	Main Vac valve opened
5/31/2010	9:18:27 PM	Bypass valve opened
5/31/2010	9:18:27 PM	Helium MFC set to  0.000000
5/31/2010	9:18:27 PM	H2 MFC set to  0.000000
5/31/2010	9:18:27 PM	BCl3 MFC set to  0.000000
5/31/2010	9:18:27 PM	PHl3 MFC set to  0.000000
5/31/2010	9:18:27 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:18:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:18:27 PM	Tube furnace set to 0
5/31/2010	9:23:27 PM	H2 valve closed
5/31/2010	9:23:27 PM	BCl3 valve closed
5/31/2010	9:23:27 PM	PH3 valve closed
5/31/2010	9:23:27 PM	SiCl4 pre valve closed
5/31/2010	9:23:27 PM	SiCl4 post valve closed
5/31/2010	9:23:27 PM	Main Vac valve closed
5/31/2010	9:23:27 PM	Bypass valve closed
5/31/2010	9:23:27 PM	Bubbler valve closed
5/31/2010	9:23:27 PM	Helium valve opened
5/31/2010	9:23:27 PM	Helium MFC set to  500.000000
5/31/2010	9:23:27 PM	H2 MFC set to  0.000000
5/31/2010	9:23:27 PM	BCl3 MFC set to  0.000000
5/31/2010	9:23:27 PM	PHl3 MFC set to  0.000000
5/31/2010	9:23:27 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:23:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:23:27 PM	Tube furnace set to 0
5/31/2010	9:24:48 PM	Helium valve closed
5/31/2010	9:24:48 PM	H2 valve closed
5/31/2010	9:24:48 PM	BCl3 valve closed
5/31/2010	9:24:48 PM	PH3 valve closed
5/31/2010	9:24:48 PM	SiCl4 pre valve closed
5/31/2010	9:24:48 PM	SiCl4 post valve closed
5/31/2010	9:24:48 PM	Main Vac valve closed
5/31/2010	9:24:48 PM	Bypass valve closed
5/31/2010	9:24:48 PM	Bubbler valve closed
5/31/2010	9:24:48 PM	Helium MFC set to  0.000000
5/31/2010	9:24:48 PM	H2 MFC set to  0.000000
5/31/2010	9:24:48 PM	BCl3 MFC set to  0.000000
5/31/2010	9:24:48 PM	PHl3 MFC set to  0.000000
5/31/2010	9:24:48 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:24:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:24:48 PM	Tube furnace set to 0
5/31/2010	9:25:03 PM	Helium valve closed
5/31/2010	9:25:03 PM	H2 valve closed
5/31/2010	9:25:04 PM	BCl3 valve closed
5/31/2010	9:25:04 PM	PH3 valve closed
5/31/2010	9:25:04 PM	SiCl4 pre valve closed
5/31/2010	9:25:04 PM	SiCl4 post valve closed
5/31/2010	9:25:04 PM	Main Vac valve closed
5/31/2010	9:25:04 PM	Bubbler valve closed
5/31/2010	9:25:04 PM	Bypass valve opened
5/31/2010	9:25:04 PM	Helium MFC set to  0.000000
5/31/2010	9:25:04 PM	H2 MFC set to  0.000000
5/31/2010	9:25:04 PM	BCl3 MFC set to  0.000000
5/31/2010	9:25:04 PM	PHl3 MFC set to  0.000000
5/31/2010	9:25:04 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:25:04 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:25:04 PM	Tube furnace set to 0
5/31/2010	9:25:37 PM	Helium valve closed
5/31/2010	9:25:37 PM	H2 valve closed
5/31/2010	9:25:37 PM	BCl3 valve closed
5/31/2010	9:25:37 PM	PH3 valve closed
5/31/2010	9:25:37 PM	SiCl4 pre valve closed
5/31/2010	9:25:37 PM	SiCl4 post valve closed
5/31/2010	9:25:37 PM	Bubbler valve closed
5/31/2010	9:25:37 PM	Main Vac valve opened
5/31/2010	9:25:37 PM	Bypass valve opened
5/31/2010	9:25:37 PM	Helium MFC set to  0.000000
5/31/2010	9:25:37 PM	H2 MFC set to  0.000000
5/31/2010	9:25:37 PM	BCl3 MFC set to  0.000000
5/31/2010	9:25:37 PM	PHl3 MFC set to  0.000000
5/31/2010	9:25:37 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:25:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:25:37 PM	Tube furnace set to 0
5/31/2010	9:30:37 PM	H2 valve closed
5/31/2010	9:30:37 PM	BCl3 valve closed
5/31/2010	9:30:37 PM	PH3 valve closed
5/31/2010	9:30:37 PM	SiCl4 pre valve closed
5/31/2010	9:30:37 PM	SiCl4 post valve closed
5/31/2010	9:30:37 PM	Main Vac valve closed
5/31/2010	9:30:37 PM	Bypass valve closed
5/31/2010	9:30:37 PM	Bubbler valve closed
5/31/2010	9:30:37 PM	Helium valve opened
5/31/2010	9:30:37 PM	Helium MFC set to  500.000000
5/31/2010	9:30:37 PM	H2 MFC set to  0.000000
5/31/2010	9:30:37 PM	BCl3 MFC set to  0.000000
5/31/2010	9:30:37 PM	PHl3 MFC set to  0.000000
5/31/2010	9:30:37 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:30:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:30:37 PM	Tube furnace set to 0
5/31/2010	9:31:59 PM	Helium valve closed
5/31/2010	9:31:59 PM	H2 valve closed
5/31/2010	9:31:59 PM	BCl3 valve closed
5/31/2010	9:31:59 PM	PH3 valve closed
5/31/2010	9:31:59 PM	SiCl4 pre valve closed
5/31/2010	9:31:59 PM	SiCl4 post valve closed
5/31/2010	9:31:59 PM	Main Vac valve closed
5/31/2010	9:31:59 PM	Bypass valve closed
5/31/2010	9:31:59 PM	Bubbler valve closed
5/31/2010	9:31:59 PM	Helium MFC set to  0.000000
5/31/2010	9:31:59 PM	H2 MFC set to  0.000000
5/31/2010	9:31:59 PM	BCl3 MFC set to  0.000000
5/31/2010	9:31:59 PM	PHl3 MFC set to  0.000000
5/31/2010	9:31:59 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:31:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:31:59 PM	Tube furnace set to 0
5/31/2010	9:32:14 PM	Helium valve closed
5/31/2010	9:32:14 PM	H2 valve closed
5/31/2010	9:32:14 PM	BCl3 valve closed
5/31/2010	9:32:14 PM	PH3 valve closed
5/31/2010	9:32:14 PM	SiCl4 pre valve closed
5/31/2010	9:32:14 PM	SiCl4 post valve closed
5/31/2010	9:32:14 PM	Main Vac valve closed
5/31/2010	9:32:14 PM	Bubbler valve closed
5/31/2010	9:32:14 PM	Bypass valve opened
5/31/2010	9:32:14 PM	Helium MFC set to  0.000000
5/31/2010	9:32:14 PM	H2 MFC set to  0.000000
5/31/2010	9:32:14 PM	BCl3 MFC set to  0.000000
5/31/2010	9:32:14 PM	PHl3 MFC set to  0.000000
5/31/2010	9:32:14 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:32:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:32:14 PM	Tube furnace set to 0
5/31/2010	9:32:47 PM	Helium valve closed
5/31/2010	9:32:47 PM	H2 valve closed
5/31/2010	9:32:47 PM	BCl3 valve closed
5/31/2010	9:32:47 PM	PH3 valve closed
5/31/2010	9:32:47 PM	SiCl4 pre valve closed
5/31/2010	9:32:47 PM	SiCl4 post valve closed
5/31/2010	9:32:47 PM	Bubbler valve closed
5/31/2010	9:32:47 PM	Main Vac valve opened
5/31/2010	9:32:47 PM	Bypass valve opened
5/31/2010	9:32:47 PM	Helium MFC set to  0.000000
5/31/2010	9:32:47 PM	H2 MFC set to  0.000000
5/31/2010	9:32:47 PM	BCl3 MFC set to  0.000000
5/31/2010	9:32:47 PM	PHl3 MFC set to  0.000000
5/31/2010	9:32:47 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:32:47 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:32:47 PM	Tube furnace set to 0
5/31/2010	9:37:47 PM	Helium valve closed
5/31/2010	9:37:47 PM	H2 valve closed
5/31/2010	9:37:47 PM	BCl3 valve closed
5/31/2010	9:37:47 PM	PH3 valve closed
5/31/2010	9:37:47 PM	SiCl4 pre valve closed
5/31/2010	9:37:47 PM	SiCl4 post valve closed
5/31/2010	9:37:47 PM	Bubbler valve closed
5/31/2010	9:37:47 PM	Main Vac valve opened
5/31/2010	9:37:47 PM	Bypass valve opened
5/31/2010	9:37:47 PM	Helium MFC set to  0.000000
5/31/2010	9:37:47 PM	H2 MFC set to  0.000000
5/31/2010	9:37:47 PM	BCl3 MFC set to  0.000000
5/31/2010	9:37:47 PM	PHl3 MFC set to  0.000000
5/31/2010	9:37:47 PM	SiCl4 MFC set to  0.000000
5/31/2010	9:37:47 PM	Bypass solenoid MFC set to  0.000000
5/31/2010	9:37:48 PM	Tube furnace set to 0
5/31/2010	9:37:49 PM	Run finished at 9:37 PM
5/31/2010	9:37:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
